Case Studies

Blind micro-holes in sapphire

For this project, which was intended for a fiber optic application, we drilled a series of five by five blind micro-hole arrays in a sapphire wafer using an ArF excimer laser with a wavelength of 193 nm.

The wafer had a diameter of 100 mm. Each hole had a diameter of 200 μm at the entrance of the hole, with a bottom diameter of 150 μm. The bottoms of the holes were flat to within 5 μm.  The side walls of each hole had a surface roughness of approximately 1 μm.

At the request of the client, Precision MicroFab manufactured 20 different hole geometries for testing purposes.

If you’d like more information on this project or if you’re interested in a similar service, please contact us.





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Up close

The bottoms of these blind micro-holes have a diameter of 150 μm and are flat to within 5 μm.
The side walls of each hole had a surface roughness of approximately 1 μm.
Working on the 10th iteration of the array on a single sapphire wafer.